MICRONANO – Advanced micro- and nano-making processes
Project code:
Notice: D.M. 593/2000 Article 13
Funder: Ministry of Education, University and Research (D.M. 921/Ric. from 17/05/2006)
Period: March 2006 – February 2010
Budget: € 6.245.000,00
Advanced micro- and nano-making processes for the realization of functional devices or devices for applications in the field of electronics, photonics, micromechanics and biosensoristics.
Industrial research activities for:
– Development of materials and technologies for the realization of MEMS sensors and actuators based on piezoelectric and piezoresistive thin-films.
– Realization of a prototype microcitofluorimeter for biological screening applications.
– Realization of individual devices and networks for molecular and bioelectronics, for applications in the field of molecular computation and advanced biosensoristics.
– Development of alternative lithographs.
PARTNERS:
– DHITECH SCARL
– STMicroelectronics SRL (Actator Subject)
– National Research Council (Actuator Subject)
– University of Salento (Actator subject)